Electronic Design
MEMS Vacuum Sensors Offer Ultra Low Power Consumption

MEMS Vacuum Sensors Offer Ultra Low Power Consumption

MEMS Pirani vacuum sensors targeted at HVAC and industrial applications, offer breakthrough vacuum measurement that enhances miniaturization.

Posifa’s PVC 1000 family, a new line of Pirani vacuum sensors targeted at HVAC and industrial applications, embodies the latest MEMS innovations while offering breakthrough vacuum measurement that enhances miniaturization. The Posifa sensors measure minute changes in resistance to a heated element resulting from heat transfer to the surrounding gas. Due to the minute volume of the gas measured, the sensors deliver ultra-low power consumption (<5 mW), while maintaining fast response time of <5 mSec. The devices are also shock resistance to 1,000 g making them suitable for gas volume as low as 0.1 cm3. Applications include: analytical instruments, leak detection in any closed system maintained under primary vacuum, vacuum packing machines, portable digital vacuum gauges, small mechanical systems to achieve specified vacuum levels and low cost vacuum switches to verify vacuum from 10 millitorr to 30 torr. Samples are available now in 4-lead TO-5 and 4-lead TO-46 metal can packages. Posifa offers design services to customize the packaging of the sensors element, as well as the necessary cabling and connectors. Pricing for the TO-5 packaged PVC1001 MEMS vacuum sensor is $12.50 each/1,000.

POSIFA MICROSYSTEMS INC.

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