A Look Behind the Mask of Multi-Patterning (.PDF Download)

At the rate that new technology nodes keep racing by, it sure feels like we’re speeding down the Autobahn in a Ferrari, pedal to the floor. The first 16-/14-nm production designs for those fabless companies on the bleeding edge are already being released to production, with many more companies doing test chips. At the same time, 10-nm process development...

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