A design kit for Sandia's Module Monolithic MEMS (M3S) fabrication process is part of the firm's MEMS Pro CAE tool suite. The design kit lowers fabrication risks by letting engineers ensure that designs conform to the specifications of the advanced M3S process. The kit includes M3S process specification files, design rules, layer definitions, model parameters, and other M3S technology information. Easy examples are included with the kit, making it possible for engineers without any prior knowledge of the M3S process to produce foundry ready designs. Training classes are conducted at Sandia and Tanner, and prototyping services are provided for a broad spectrum of users.