Fully Automated System Puts Optical MEMS Production To The Test

June 4, 2001
The industry's first fully automated production tester, Etec's M/STeP-o, specifically targets wafer/die microelectromechanical systems (MEMS) and micro-optoelectromechanical systems (MOEMS). Its users can test and characterize a wide range of MOEMS...

The industry's first fully automated production tester, Etec's M/STeP-o, specifically targets wafer/die microelectromechanical systems (MEMS) and micro-optoelectromechanical systems (MOEMS). Its users can test and characterize a wide range of MOEMS devices, including variable optical attenuators (VOAs), optical switches, optical cross connects (OXCs), and 2D and 3D micromirror arrays. M/STeP-o also provides optical, electrical, and mechanical testing in an integrated, turnkey system.

Users can characterize the displacement of the MEMS element as a function of applied stimulus (voltage/current). They also can measure in-plane and out-of-plane displacement in six degrees of freedom with nanometer resolution. Other typical functions include response time and resonance, as well as reflectivity and other surface characterization measurements.

M/STeP-o incorporates a high-performance wafer prober, a cassette-to-cassette wafer handler, a state-of-the-art optical head assembly, and a precision electrical stimulus/measurement package. An open-architecture software environment enables efficient product changeovers and easy operation. Data output formats include a wafer map and an SQL server database.

Additionally, M/STeP-o can test MOEMS wafers or die on film. Industry-standard automation permits straightforward integration into the production line. With it, MEMS device manufacturers are able to rapidly and cost-effectively deploy robust, high-volume production test solutions for current and future optical MEMS requirements.

The system supplies 4-, 8-, 16-, and 32-channel test-head modules that can be ganged for high-pin-count testing. M/STeP-o also features four bidirectional digital and two analog pins. One pin is available for peak-to-peak voltage device-under-test (DUT) programming.

M/STeP-o's parametric unit has four-quadrant voltage and current measurement capability and a force-voltage range of ±10 V at 16-bit resolution. There are four force-current ranges, at 16 bits, or 10 and 100 µA, as well as 1 and 100 mA. A digital pattern subsystem with 128 kbytes of memory depth features branching, looping, match-mode, and subroutine capabilities. Clock rates up to 50 MHz and DUT rates up to 25 MHz are possible.

The system is based on Windows NT. Pricing starts at about $550,000 and ranges up to about $1 million. Delivery is within 90 days.

Etec Inc., 83 Pine St., Peabody, MA 01960; (978) 535-7683; fax (978) 535-7003; www.etec-inc.com.

Sponsored Recommendations

Highly Integrated 20A Digital Power Module for High Current Applications

March 20, 2024
Renesas latest power module delivers the highest efficiency (up to 94% peak) and fast time-to-market solution in an extremely small footprint. The RRM12120 is ideal for space...

Empowering Innovation: Your Power Partner for Tomorrow's Challenges

March 20, 2024
Discover how innovation, quality, and reliability are embedded into every aspect of Renesas' power products.

Article: Meeting the challenges of power conversion in e-bikes

March 18, 2024
Managing electrical noise in a compact and lightweight vehicle is a perpetual obstacle

Power modules provide high-efficiency conversion between 400V and 800V systems for electric vehicles

March 18, 2024
Porsche, Hyundai and GMC all are converting 400 – 800V today in very different ways. Learn more about how power modules stack up to these discrete designs.

Comments

To join the conversation, and become an exclusive member of Electronic Design, create an account today!