The S600 Automated Parametric Test System is designed for DC parametric testing of deep submicron CMOS processes. System performance provides 1 pA settling to within 5% in less than 100 ms with 0.1 V applied.
The design is modular and accommodates up to eight source-measure units. The test head features active electronics for each of the probing pins. Test head amplifiers are close to the device under test and each pin can be driven by its own bias voltage supply. A 100-MHz, 50-W switching matrix provides impedance-matched, low-loss access to the probe pins. Keithley Instruments, (800) 552-1115.
