Piezo-based FSM platforms support laser-beam control
Auburn, MA. PI (Physik Instrumente) announced that it has broadened its portfolio of piezo steering mirrors. With millisecond response and settling time and high dynamic linearity, the new S-335 fast-steering-mirror (FSM) platforms are suitable for precision image processing and image stabilization, laser beam steering, materials processing, and lithography.
Piezo motion-based mechanisms provide a variety of features that are sought after in life-science and medical engineering applications, such sterile ceramic designs and lubricant-free drives, the company notes, citing as examples endoscopy and bio-imaging of the eye. You can view a video of a fast steering mirror/piezo drive for laser eye surgery here and also read the article “Advances in Piezo Mechanics Aid Eye Surgery.”
Integrated EDM (electrical discharge machining) flexure-based motion amplifiers provide a tip/tilt angle up to 35 mrad, equal to an optical deflection angle of 70 mrad (4°). ID chip support allows for fast start-up and a simple data exchange between tip/tilt platforms and controllers.
PI piezo steering mirrors are based on a parallel-kinematics design with coplanar rotational axes and a single moving platform driven by two pairs of differential actuators. The advantage is jitter-free, multi-axis motion with temperature stability. Compared to stacked (two-stage) mirror scanners, the parallel-kinematics design provides symmetrical dynamic performance in both axes with faster response and better linearity in a smaller package.
http://www.pi-usa.us/products/PDF_Data/S335_Fast_Tip-Tilt_Platform.pdf
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