Piezo-based FSM platforms support laser-beam control

Sept. 30, 2017

Auburn, MA. PI (Physik Instrumente) announced that it has broadened its portfolio of piezo steering mirrors. With millisecond response and settling time and high dynamic linearity, the new S-335 fast-steering-mirror (FSM) platforms are suitable for precision image processing and image stabilization, laser beam steering, materials processing, and lithography.

S-335 steering mirror platforms provide precise angular tip/tilt motion of the top platform around two orthogonal axes. These flexure-guided, electroceramic-driven systems can provide higher accelerations than other actuators, enabling step response times in the submillisecond range, with frictionless backlash-free motion. The single pivot-point design also prevents the drawback of polarization rotation, which is common with conventional 2-axis stacked systems—for example, galvo scanners.

Piezo motion-based mechanisms provide a variety of features that are sought after in life-science and medical engineering applications, such sterile ceramic designs and lubricant-free drives, the company notes, citing as examples endoscopy and bio-imaging of the eye. You can view a video of a fast steering mirror/piezo drive for laser eye surgery here and also read the article “Advances in Piezo Mechanics Aid Eye Surgery.”

Integrated EDM (electrical discharge machining) flexure-based motion amplifiers provide a tip/tilt angle up to 35 mrad, equal to an optical deflection angle of 70 mrad (4°). ID chip support allows for fast start-up and a simple data exchange between tip/tilt platforms and controllers.

PI piezo steering mirrors are based on a parallel-kinematics design with coplanar rotational axes and a single moving platform driven by two pairs of differential actuators. The advantage is jitter-free, multi-axis motion with temperature stability. Compared to stacked (two-stage) mirror scanners, the parallel-kinematics design provides symmetrical dynamic performance in both axes with faster response and better linearity in a smaller package.



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