Chip Performs MEMS Sensor Readouts

Nov. 1, 1999

Capable of measuring minute changes in capacitance, the Universal Capacitance Readout (UCR) family of ICs is designed to provide readout and control functions to microelectromechanical systems (MEMS) sensors, such as accelerometers, micro-gyros, and motion and pressure monitors and switches. The ICs provide these functions without introducing unacceptable levels of noise The chips can sense capacitance changes of 0.4 femtoFarads without any external components. The devices can be interfaced to either a differential capacitor pair or a single capacitive sensor and can provide a high-level signal that is linear with a full range of sense capacitance. Built-in self-test and on-chip gain and offset correction are also included.

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