As smart micro- and nano-systems move to 300-mm wafers, new technology must be developed to support the miniaturization of these optical systems. The Lab4MEMS II project, led by ST Microelectronics, focuses on micro-opto-electromechanical systems (MOEMS) that leverage MEMS with micro-optics to sense and manipulate optical signals. The project will aid the design, fabrication, and testing of various devices, including optical switches, arrays of micro-mirrors, optical cross-connects, lasers, and micro lenses.
Lab4MEMS II was initially launched by the European Nanoelectronics Initiative Advisory Council (ENIAC) Joint Undertaking (JU). The Pilot-Line project will expand ST’s operational 200-mm-wafer manufacturing facility to handle higher volumes, while also adding optical technology capabilities. This will help increase production of switches, displays, and devices used in micro-projectors, laser micro-scanners, next-generation human-machine interfaces, and micro-spectrometers. Another goal of the project is to optimize the production of dual single-axis mirrors, and potentially dual-axis single mirrors in the future.
Lab4MEMS II is a $30 million project with 20 industrial, academic, and research partners spanning nine European countries. ST’s designation as leader and coordinating partner offers manufacturing, technical, and organizational competencies. Other partners include the Politecnico di Torino and di Milanom, the Consorzio Nazionale Interuniversitario per la Nanoelettronica, the Commissariat Al Energie Atomique Et Aux Energies Alternatives, the University of Malta, MURATA Electronics, and more.