Veeco Instruments Inc. has announced that Veeco CNT, formerly known as Ultratech/Cambridge Nanotech, shipped its 500th atomic layer deposition (ALD) system to North Carolina State University. The Veeco CNT Fiji G2TM ALD System will enable the University to perform a variety of research applications for next-generation electronic devices, including high-performance wearables and sensors.
“The Veeco CNT Fiji G2 ALD system will be a critical tool to meet our ambitious research goals,” said Bongmook Lee, Ph.D., research assistant professor of the NSF NERC ASSIST Center at North Carolina State University. “This ALD tool enables advances in our research for high performance CMOS, nonvolatile memory, next-generation wide bandgap power devices, and environmental and physiological sensors. We selected the Veeco CNT Fiji G2 for its demonstrated ability to reliably deposit the most challenging oxide and nitride thin films. We are happy to be part of this milestone in receiving the 500th system and we continue to engage in a strong relationship with Veeco CNT.”
The Veeco CNT Fiji G2 ALD System is an advanced thin film next-generation ALD system capable of performing thermal and plasma-enhanced deposition in a modular, high-vacuum, flexible architecture that accommodates a wide range of deposition modes using multiple configurations of precursors and plasma gases. The system’s intuitive interface makes it easy to monitor and change recipes and processes as required by customers.
“Our 500th ALD system shipment validates the increasing interest in ALD technology,” said Ganesh Sundaram, Ph.D., vice president of Applied Technology, Veeco CNT. “Now, with the backing of Veeco, we will continue our legacy to build and enhance the deployment of ALD technology, helping customers like North Carolina State University develop next generation electronic devices.”
On May 26, 2017, Veeco acquired Ultratech Inc., a supplier of lithography, laser-processing, inspection, and atomic layer deposition systems. Over the past 15 years, Veeco CNT said it has become a leading provider of ALD systems for a wide range of university R&D and commercial applications including biomedical, electronics, energy, and optical.
