In-line transport platform aids MEMS sensor production

    Feb. 1, 2006
    Plasma process technology specialist Surface Technology Systems plc (www.stsystems.co.uk) , has begun marketing an in-line transport platform called VPX that allows as many as three process chambers to share a common wafer-transport system.

    Plasma process technology specialist Surface Technology Systems plc has begun marketing an in-line transport platform called VPX that allows as many as three process chambers to share a common wafer-transport system. The platform, based on the Brooks Marathon Express MX400, is designed to reduce the cost for pilot production of MEMS automotive sensors, among other devices. It provides an automation platform to service up to three STS plasma process modules with a single-vacuum 25-wafer cassette, for improved productivity at lower cost.

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