mechatronic systemtechnik, a supplier of automation equipment for semiconductor wafer handling, announced the availability of the mWL.cs mechatronic calotte loader. A fully automated stand-alone system for transferring wafers between cassettes and calottes, the mWL.cs provides integrated device manufacturers (IDMs) an opportunity to increase yield and improve process traceability at a high throughput.
Evaporation process tools often utilize spherical carriers and rings to meet uniformity and defectivity targets. However, the design of these tools has made it challenging to introduce automated wafer handling in this step of the manufacturing process. IDMs invariably default to manual wafer loading, which has resulted in yield degradation and an increased risk for misprocessing.
Key features of the mWL.cs mechatronic calotte loader include:
Handling accuracy and repeatability — hand-off position measurement and auto-teaching capabilities (<50µm)
Process traceability — host notification of Wafer ID, Cassette ID, Segment ID, and position in the segment
Redundancy — 2 loading areas for continuous processing
Transfer times — high throughput of up to 240 wph that enables ROI within two years
Dual-size handling — customizable to handle 4”, 6”, 8”, or 6” & 8” (dual size)
Small footprint — less than 7m2
A specialist in fully-automated handling systems for non-standard substrates and handling requirements, mechatronic recognizes and addresses the semiconductor industry’s need for the handling of ultra-sensitive substrates used in modern wafer fabrication technologies.