An ultra-miniature silicon micro-electromechanical (MEM) device, MS 6100 series of low power, calibrated accelerometers em;ploys an ASIC for signal conditioning and an EEPROM for storage of calibrated data to provide a high precision, robust and high-stability sensing solution. For battery powered portable and remote applications, these devices offer a 0 to 2 gram range and power consumption of 170 µA at 3V and operating voltage range of 2.4V to 5.5V. Calibrated linear voltage output is 0.5V to 2.5V with non-linearity of 0.4% full scale and offset of 0.005V derived through the digital programming. The ASIC has a built-in self-test that can validate performance of the sensor and the ASIC. Operating temperature range is -40°C to 125°C.