Nanusens builds nanoscale sensor structures inside the CMOS layers utilizing standard CMOS processes within the same production flow used to make the control electronics on the same chip.
Nanusens' novel approach to creating nanoscale sensor structures inside the CMOS layers.
How the methodology helps shrink cost and size.
Dreamstime_Warenemy_30451502
Previously, MEMS sensors were created by employing proprietary processes to build the MEMS sensor structure on top of a CMOS wafer. Each design of a MEMS sensor requires a unique method to make the structure, which takes years to perfect. There are no economies of scale or ability to rapidly ramp up production, apart from duplicating the production line.
Nanusens creates nanoscale sensor structures inside the CMOS layers using standard CMOS processes within the same production flow that’s employed for the control electronics on the same chip. This innovative approach reduces the size and cost as it benefits from the vast economies of scale of using giant CMOS fabs. The resulting single chip solution has a packaged size of only 0.5 mm3.
Leveraging 0.18-µm CMOS technology, enabling the use of any fab, the chip benefits from lower costs simply by moving to smaller CMOS process nodes. The intermetal dielectric (IMD) is etched away through the pad openings in the passivation layer using vapor HF (vHF) to create the nanosensor structures. The holes are then sealed, and the chips are packaged as necessary.
Because only standard CMOS processes with minimal post-processing are used, the chips can have high yields similar to CMOS devices. This also means that the production is fab-independent.
An Army veteran, Alix Paultre was a signals intelligence soldier on the East/West German border in the early ‘80s, and eventually wound up helping launch and run a publication on consumer electronics for the US military stationed in Europe. Alix first began in this industry in 1998 at Electronic Products magazine, and since then has worked for a variety of publications in the embedded electronic engineering space. Alix currently lives in Wiesbaden, Germany.
Also check out his YouTube watch-collecting channel, Talking Timepieces.
Dr. Josep Montanyà Silvestre is CEO and co-founder of Nanusens, leading the company with +18 years of experience in MEMS, patents and the semiconductor industry. He founded Baolab Microsystems prior to Nanusens.
