Voice Coil Stage Performs Sub-Micron Positioning

Oct. 8, 2008
The VCS-10H voice-coil stage delivers a 150-nm positioning resolution and is suitable for use as a horizontal or vertical axis. Specifying a 10-mm travel distance, the component integrates a non-contact optical and/or digital position feedback sensor

The VCS-10H voice-coil stage delivers a 150-nm positioning resolution and is suitable for use as a horizontal or vertical axis. Specifying a 10-mm travel distance, the component integrates a non-contact optical and/or digital position feedback sensor for 200-nm repeatability. It measures 33 mm x 76 mm x 31.8 mm and operates from a ±12- to ± 24-Vdc source. The stage can be supplied with a single-axis, dc-motor controller and amplifier for applications requiring high temporal and spatial servo precision. The cross roller stage handles up to 1.5 lbs. of continuous force and 3 lbs. peak for 10s and is clean-room compatible. For ease of integration, the VCS-10H includes multiple sets of mounting holes on several surfaces. EQUIPMENT SOLUTIONS, Sunnyvale, CA. (408) 245-7161.

Company: EQUIPMENT SOLUTIONS

Product URL: Click here for more information

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