Piezo Nanopositioners Travel from 100 to 600 µm

Offering nanometer-level performance, Aerotech’s QNP-L series of linear piezo nanopositioning stages are guided by precision flexures optimized via finite element analysis to ensure high stiffness and long life. Strong resonant frequency produces high process throughput and fast closed-loop response. Available in 100- to 600-µm travel lengths, all QNP-L piezo stages offer closed-loop feedback thanks to a capacitive-sensor design. Capacitive sensors directly measure the positioning carriage’s output to boost linearity and positioning repeatability. When coupled with the company’s Q-series controllers/drives, the piezo nanopositioning stages feature sub-nanometer positioning resolution and in-position stability (jitter), along with high-positioning bandwidth. Applications range from microscopy to optics alignment. All are available with or without capacitive sensor feedback. An optional mounting plate provides direct mounting to English or metric breadboard optical tables. The stages come in vacuum-prepared versions on request.

AEROTECH INC.