RF Power Unit Cuts Parts Count

Sept. 1, 1998

Designed for process and equipment designers who use thin-film technology in the manufacture of semiconductors, data-storage devices and flat-panel displays, the Apex system provides power repeatability, increased reliability, and lower cost through integration of the 13.56-MHz power amplifier, impedance match and VI probe. The Apex single-package design achieves these benefits by significantly reducing the number of parts compared with other RF power systems, including firm's SwitchMatch, a selectable fixed-impedance match using PIN diodes. This product is available in power ranges of 1 kW to 10 kWand frequencies of 13.56 and 27.12 MHz.

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