EBMs Drive SEMs

Designed to drive electron beam columns in scanning electron microscopes (SEMs), the company's electron beam modules (EBMs) deliver power with a stability of less than or equal to 8 ppm over three minutes after warm up. The module integrates the required accelerator, bias, and filament sources in a single package. The accelerator is programmable to 30 kV at 300 µA, and both the filament and bias are floating, referenced to the accelerator voltage. Other features include low ripple on all outputs: less than 10 ppm p-p on the accelerator, less than 0.1% p-p on the filament, and less than 150 mVp-p on the bias outputs. For more details and price, call SPELLMAN HIGH VOLTAGE ELECTRONICS, Hauppauge, NY. (631) 630-3000.