DC/RF Parametric Probe Cards Get Down To 45 nm

Taking a swipe at the cost of ownership, two additions to the Pyramid parametric probe card family allow single-pass DC and RF measurements, promising to reduce the cost of parametric production test for semiconductors with advanced process nodes at 65 nm, 45 nm, and beyond. The cards employ the company's Pyramid Plus membrane manufacturing process, which enables multiple specification improvements such as leakage performance to 1 fA with a 5s settling time and reliable contact on smaller test pads. The membrane technology has the ability to integrate 20-GHz transmission lines and guarded traces to the probe tip, respectively, to reduce crosstalk and improve settling time. The cards are available in either DC only (PDC50) or DC plus RF (PRF50) configurations with options for pad size and leakage specifications. Additionally, they are compatible with Keithley S600 Series and Agilent 4070/4080 Series parametric testers. Price and delivery times vary depending upon configuration. CASCADE MICROTECH INC., Beaverton, OR. (800) 550-3279.