MEMS-Based Chip Delivers Fully Integrated Gyro

Microelectromechanical system (MEMS) surface micromachining technology has been tapped to produce what is said to be the world’s first fully integrated gyroscope for angular rate sensing applications. Melding on a single chip both an angular rate sensor and signal processing circuitry, the ADXRS gyro can be used to provide information for triggering automobile airbags during a vehicle rollover, for improving GPS system accuracy, and for stabilizing vehicles, robots and other objects. With an accurate, reliable design that is immune to shock and vibration, the new gyro is said to deliver a stable output in the presence of mechanical noise up to 2,000g over a wide frequency range, a capability important in applications such as auto rollover detection. The gyroscope is housed in a 7 mm x 7 mm x 3 mm BGA package, consumes only 5 mA at 5V, and is available in two versions: ADXRS300 providing a dynamic range of 300°/s and ADXRS150 offering a 150°/s range. The chip gyros cost $30 each/1,000. Samples are available, with full-scale production scheduled to begin at the end of the year. For more details, contact ANALOG DEVICES INC., Wilmington, MA. (781) 937-1428.