Electronic Design

Motion Analyzer Characterizes Complex MEMS/MOEMS Devices

Few systems are able to fully characterize the complicated motions of microelectromechanical system (MEMS) and micro-optoelectromech-anical system (MOEMS) structures. This need is becoming more critical, considering the explosive growth of such structures in the RF and communications arenas.

Based in Peabody, Mass., Etec has solved this dilemma with its turnkey MEMS Motion Analyzer system. An essential tool for the MEMS/MOEMS development lab, it can measure motions in six degrees of freedom, with nanometer resolution, at frequencies from 1 Hz to 10 MHz.

The MEMS Motion Analyzer combines video microscopy, stroboscopic illumination, and proprietary algorithms to analyze the motions of individual microstructures, or arrays of microstructures, simultaneously. Engineers and researchers can test and characterize the complex motions of virtually any MEMS/MOEMS device.

Devices that can be analyzed include variable optical attenuators (VOAs), optical switches, optical cross connects (OXCs), and 2D and 3D micromirror arrays. The system can readily analyze performance characteristics, such as resonant behavior, transient response, settling time, switching time, and complex motion profiles, all with simple point-and-click operation.

Also, it incorporates powerful data-analysis and report-generation tools, enabling the clear presentation of complex motion data. Reports summarize frequency response and motion data for in-plane and out-of-plane motions. Real-time slow-motion video provides a visual display of the MEMS motion in three dimensions.

Pricing for the MEMS Motion Analyzer varies, based on options. A basic 2D system costs about $130,000, while a basic 3D system costs about $177,000. Delivery is within 90 days.

Etec Inc., 83 Pine St., Peabody, MA 01960; (978) 535-7683; fax (978) 535-7003; www.etec-inc.com.

See associated figure

TAGS: Components
Hide comments


  • Allowed HTML tags: <em> <strong> <blockquote> <br> <p>

Plain text

  • No HTML tags allowed.
  • Web page addresses and e-mail addresses turn into links automatically.
  • Lines and paragraphs break automatically.