Motion Analyzer Characterizes Complex MEMS/MOEMS Devices

April 30, 2001

Few systems are able to fully characterize the complicated motions of microelectromechanical system (MEMS) and micro-optoelectromech-anical system (MOEMS) structures. This need is becoming more critical, considering the explosive growth of such...

Roger Allan

Based in Peabody, Mass., Etec has solved this dilemma with its turnkey MEMS Motion Analyzer system. An essential tool for the MEMS/MOEMS development lab, it can measure motions in six degrees of freedom, with nanometer resolution, at frequencies from 1 Hz to 10 MHz.

The MEMS Motion Analyzer combines video microscopy, stroboscopic illumination, and proprietary algorithms to analyze the motions of individual microstructures, or arrays of microstructures, simultaneously. Engineers and researchers can test and characterize the complex motions of virtually any MEMS/MOEMS device.

Devices that can be analyzed include variable optical attenuators (VOAs), optical switches, optical cross connects (OXCs), and 2D and 3D micromirror arrays. The system can readily analyze performance characteristics, such as resonant behavior, transient response, settling time, switching time, and complex motion profiles, all with simple point-and-click operation.

Also, it incorporates powerful data-analysis and report-generation tools, enabling the clear presentation of complex motion data. Reports summarize frequency response and motion data for in-plane and out-of-plane motions. Real-time slow-motion video provides a visual display of the MEMS motion in three dimensions.

Pricing for the MEMS Motion Analyzer varies, based on options. A basic 2D system costs about $130,000, while a basic 3D system costs about $177,000. Delivery is within 90 days.

Etec Inc., 83 Pine St., Peabody, MA 01960; (978) 535-7683; fax (978) 535-7003; www.etec-inc.com.

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About the Author

Roger Allan

Roger Allan is an electronics journalism veteran, and served as Electronic Design's Executive Editor for 15 of those years. He has covered just about every technology beat from semiconductors, components, packaging and power devices, to communications, test and measurement, automotive electronics, robotics, medical electronics, military electronics, robotics, and industrial electronics. His specialties include MEMS and nanoelectronics technologies. He is a contributor to the McGraw Hill Annual Encyclopedia of Science and Technology. He is also a Life Senior Member of the IEEE and holds a BSEE from New York University's School of Engineering and Science. Roger has worked for major electronics magazines besides Electronic Design, including the IEEE Spectrum, Electronics, EDN, Electronic Products, and the British New Scientist. He also has working experience in the electronics industry as a design engineer in filters, power supplies and control systems.

After his retirement from Electronic Design Magazine, He has been extensively contributing articles for Penton’s Electronic Design, Power Electronics Technology, Energy Efficiency and Technology (EE&T) and Microwaves RF Magazine, covering all of the aforementioned electronics segments as well as energy efficiency, harvesting and related technologies. He has also contributed articles to other electronics technology magazines worldwide.

He is a “jack of all trades and a master in leading-edge technologies” like MEMS, nanolectronics, autonomous vehicles, artificial intelligence, military electronics, biometrics, implantable medical devices, and energy harvesting and related technologies.