Introduction to Multi-Patterning

Sponsored by Mentor Graphics
Nov. 29, 2016
Image

Multi-patterning enables accurate lithographic resolution at today's most advanced nodes. In this white paper, you will learn about:

  • Why advanced process nodes need multi-patterning
  • What role multi-patterning plays as compared to advanced lithographic systems
  • What different types of multi-patterning you can expect to see.
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