Micrometer Measures Sub-µm At Production Speeds

Touted as a standard setter in precision laser measurement, the LS-5000 series laser scan micrometer system provides a 0.05 µm resolution. Production applications include the measurement of object height up to four separate assembly lines, and measurement of sheet and thin film thickness. The system measures gaps between rollers as well as IC pin pitch during the semiconductor manufacturing process. A visible beam laser gives the scan system fast setup and alignment, high-speed sampling at 1,200 scans/s, and up to four sets of scan heads with four-channel operation and simultaneous monitoring of all four channels. The system also includes a large touch screen, menu-driven user interface with user-friendly software, a full range of measurement functions and plug-in boards for system expansion. KEYENCE CORP. OF AMERICA, Woodcliff Lake, NJ (888) 539-3623.