Micromachined Pressure Sensor Keeps Errors Low

The IMP2000 is a micromachined pressure sensor that takes advantage of thin-film transducer technology. It measures differential pressure across a pre-stressed silicon nitride membrane, which is the active element of a variable capacitor. An on-board ASIC performs signal conditioning and provides a ±2 vdc output. Required excitation power is just 5 vdc at less than 5 mA.The chip-scale sensing element is nearly mass-less, which means the transducer is immune to errors caused by mounting orientation and dynamic errors resulting from noise and vibration. The sensor can withstand 2000g shocks, 20g vibrations and 25X overpressure. Linearity error is rated at 0.5%.