Reno Sub-Systems extends solid-state RF lineup at SEMICON West

July 10, 2017

2 min read

San Francisco, CA. Reno Sub-Systems, a producer of high-performance RF matching networks, RF power generators, and gas-flow management systems for semiconductor manufacturing, today announced at SEMICON West the latest addition to its Precis Solid-State Generator portfolio. Capable of 1.6-kW microwave output at 2.45 GHz, the new Precis generator offers the highest-power solid-state microwave generator available for semiconductor plasma applications, the company said, adding that its approach to power generation fills a growing need for advanced subsystem technologies to keep the industry on pace with Moore’s law.

Reno Precis Generator 7x5 300dpi 300x214

“For the first time in decades, subsystems are enabling new processes and future device generations,” said Bob MacKnight, CEO of Reno Sub-Systems. “The ultimate validation of our technology is that 80% of the top semiconductor device manufacturers and equipment makers have ordered Reno products.”

The Precis microwave generator delivers accurate, repeatable, and stable microsecond ramp times using a reliable solid-state architecture. The Precis’ microwave power control offers better frequency control than comparable magnetron-based microwave generators, the company said. Eliminating aging magnetron technology also reduces maintenance requirements, and thereby cost of ownership.

The Precis family of generators is the latest addition to Reno’s differentiated Velocity Series EVC matching networks portfolio. Delivering better performance and process capabilities, the Velocity EVC matching network achieves ranges from 500 W to 4.5 kW with frequencies of 500 kHz to 40 MHz.

Precis Microwave Generator specifications:

6-kW microwave output at 2.45 GHz
Operates from 200/208, 3-phase, 50/60-Hz VAC
Coaxial and waveguide output options
Serial and analog communication
DeviceNet and EtherCAT communication options available
19″ rack mount design for ease of integration

http://www.renosubsystems.com

About the Author

Rick Nelson

Contributing Editor

Rick Nelson is a technical journalist who has served as executive editor of Test & Measurement World, chief editor of EDN, and executive editor of EE-Evaluation Engineering. He has also contributed to publications including Vision Systems Design and Electronic Design, and he has participated in many live panel discussions and webcasts. Rick has also held systems-engineering and product-development positions at General Electric and Litton Industries. He received his B.S.E.E. degree from The Pennsylvania State University.