Probing Station Handles 200-mm Assignments

Providing ultra-low CV-IV probing specifically for 200 mm, 12860 wafer probing station uses firm's AttoGuard technology that provides an ultra-low capacitance variation of less than 3 fF, as well as an ultra-low, 1-pF thermal chuck along with a fast settling time of less than 50 fA in 50 ms with a 100V step. The chuck leakage and noise is less than 20 fA over a -65°C to 300°C temperature range. The AttoGuard presents a constant potential to the wafer regardless of the position of the chuck, providing a complete shield to atto Farad levels of capacitance. This helps simplify the making of measurements such as gate overlap capacitance or sub-threshold current of sub-micron devices.