MEMS-Based Switch Fabric Device Integrates Control Electronics

June 1, 2002
In late 2002, samples are expected to be ready of new, monolithic MEMS-based switch fabric components that integrate control electronics to enable position sensing of the micro mirror structures. The first two products headed for the market are the

In late 2002, samples are expected to be ready of new, monolithic MEMS-based switch fabric components that integrate control electronics to enable position sensing of the micro mirror structures. The first two products headed for the market are the dual-axis Optical iMEMS mirror element and Optical iMEMS 1x80 linear mirror array, with both of these application-specific standard products targeted at optical metro and regional network applications. The dual-axis Optical MEMS mirror element is a general-purpose tunable optical element featuring a single X-Y gimbaled mirror in a small, hermetically-sealed ceramic package with a glass lid. The mirror rotates in the X and Y axis ±5° from the normal position, with on-board electronics used to sense mirror tilt in the two axes--tilt angle is resolvable to the 12-bit level with update rates greater than 10 kHz. Four electrodes directly driven with external high-voltage signals are used to electrostatically actuate the mirror. The Optical iMEMS 1x80 linear mirror array is also a general-purpose tunable optical element, but consists of a linear array of 80 one-dimensional micro mirrors, with the device especially useful for processing demultiplexed fiber with 100-GHz spacing. The mirror array is housed in a small, hermetically-sealed ceramic package with an AR coated glass lid. Each mirror rotates in the X axis ±3° from the normal position and is electrostatically actuated by an external high-voltage signal. For both devices, signals pass to the mirrors through an optical-quality glass lid having an anti-reflection coating on both sides and optimized for L and C band laser wavelengths. For more information, contact Howard Wisniowski at ANALOG DEVICES INC., Cambridge, MA. (617) 761-7313.

Company: ANALOG DEVICES INC.

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